Extract

Many users of electron microscope hope high resolution and high throughput. In addition to those, usability of an electron microscope is requested. To realize these requests, we developed a new multi-purpose electron microscope JEM-F200 (nickname “F2”), which equipes 200 kV field emission gun. F2 has been designed for importance of “Smart”. We show the features of F2 below in this report.

F2 has been applied our know-how on mechanical and electrical stabilities, which has been pursued in the development of aberration corrected microscopes. As a result, the resolutions for TEM and STEM in F2 are achieved to be 0.1 nm and 0.14 nm (Cold FEG & UHR configuration). For specimen stage in an electron microscope, high-speed and high-precision are requested. F2 has newly developed “Pico stage drive”, which realizes both high-speed sample drive (7 second for 2 mm) and high-resolution positioning (0.2 nm / step) by using the most-recent actuators. F2 can be equipped with “Improved Cold FEG”. With this electron source, we can perform a microanalysis with highly bright electron probe and small energy spread. HT settings are selectable optionally from 120, 100, 60, 40 and 20 kV as well as 200 and 80 kV, which are standard HT. F2 has “Dual SDD system”, which is composed of two silicon drift detectors (SDD) having large sensor area, resulting in total solid angle of 1.7 sr. The combination of dual SDD system, the improved CEFG and the advanced scan system, allows us to perform various techniques such as highly sensitive microanalysis and 3D-EDS etc. F2 allows simultaneous acquisitions of STEM-DF, BF, and BEI images. Furthermore, it is possible to acquire an ABF image, where light elements are imaged as well as heavy element, with the optional detector configuration. We believe that this new microscope enables us to open a cuting edge science and industries.

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