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Takeshi Omura, Masashi Watanabe, Yoshitsugu Tomokiyo, Quantitative evaluation of zero‐loss and core‐loss images by using EF‐TEM, Journal of Electron Microscopy, Volume 51, Issue suppl_1, 27 March 2002, Pages S87–S96, https://doi.org/10.1093/jmicro/51.Supplement.S87
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Abstract
Abstract Zero‐loss electron filtering and core‐loss electron filtering are newly developed imaging techniques in transmission electron microscopy (TEM). In this study, a new energy‐filtering TEM, JEOL JEM‐2010FEF, is used to take the zero‐loss images and Si L2,3 core‐loss maps from a standard thin‐film MAGI★CAL™, which is a cross‐sectional multilayer with known layer‐thicknesses of Si and Si‐Ge. To evaluate the qualities of the zero‐loss images and Si maps quantitatively, several parameters are defined at first. Then, the effects of the specimen thickness and the objective‐aperture size on the images are discussed.