Abstract

Abstract Zero‐loss electron filtering and core‐loss electron filtering are newly developed imaging techniques in transmission electron microscopy (TEM). In this study, a new energy‐filtering TEM, JEOL JEM‐2010FEF, is used to take the zero‐loss images and Si L2,3 core‐loss maps from a standard thin‐film MAGICAL, which is a cross‐sectional multilayer with known layer‐thicknesses of Si and Si‐Ge. To evaluate the qualities of the zero‐loss images and Si maps quantitatively, several parameters are defined at first. Then, the effects of the specimen thickness and the objective‐aperture size on the images are discussed.

This content is only available as a PDF.
You do not currently have access to this article.