Figure 2
DIC microscope image 100× objective (top) and profilometer surface contour plot resolution 0.08 μm (bottom). Left-hand column: 12-μm lapping step (δ = 245-nm rms). Right-hand column: 0.3-μm lapping step (δ = 8-nm rms).
DIC microscope image 100× objective (top) and profilometer surface contour plot resolution 0.08 μm (bottom). Left-hand column: 12-μm lapping step (δ = 245-nm rms). Right-hand column: 0.3-μm lapping step (δ = 8-nm rms).
